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The 100 mm × 100 mm Extreme Ultraviolet Graphite Pellicle: Nano‐Pellicle Production Using the Lowest Free Energy at the Graphite–Water Interface - Kim - 2020 - Advanced Materials Interfaces - Wiley Online Library
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The 100 mm × 100 mm Extreme Ultraviolet Graphite Pellicle: Nano‐Pellicle Production Using the Lowest Free Energy at the Graphite–Water Interface - Kim - 2020 - Advanced Materials Interfaces - Wiley Online Library
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